Improvement of Deposition Performance of Ultrasonic Spray Pyrolysis Deposition System through Atomizer Shape Modification
نویسندگان
چکیده
منابع مشابه
Modeling Spray Pyrolysis Deposition
The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors. Spray pyrolysis deposition is used to grow the required thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. Two models for the topography modification due to spray pyroly...
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Integration of thin tin oxide film formation into CMOS technology is a fundamental step to realize sensitive smart gas sensor devices. Spray pyrolysis is a deposition technique which has the potential to fulfil this requirement. A model for spray pyrolysis deposition is developed and implemented within a Level Set framework. Two models for the topography modification due to spray pyrolysis depo...
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ژورنال
عنوان ژورنال: Journal of The Korean Society of Manufacturing Technology Engineers
سال: 2015
ISSN: 2508-5093
DOI: 10.7735/ksmte.2015.24.4.469